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GALAXY / EL BATCH PROCESSING PLATFORM

产品中心 > 代理业务类 > GALAXY / EL BATCH PROCESSING PLATFORM

GALAXY / EL BATCH PROCESSING PLATFORM

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GALAXY / EL BATCH PROCESSING PLATFORM



CUSTOMER ADDED VALUE


• Identical chambers for manual and fully automated tools in the

modular platform

• Outstanding automation reliability and speed

• Customized to our customer’s needs

• Possibility of processing more than one substrate size per

chamber with change of carrier

• Electroless plating can be added optionally to the Galaxy Platform

• Upgrade- and future-proof

• Established high-throughput processing chambers


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